Water-immersed high precision laser focus spot size measurement apparatus

ABSTRACT

A measurement apparatus for measuring a laser focus spot size, which includes a two-dimensional image detector and an imaging system which forms a magnified image of a focus spot located an object plane onto the image detector. The imaging system includes at least an objective lens. A sealed liquid container is secured over a part of the objective lens such as the optical surface of the objective lens is immersed in the liquid (e.g. water) within the container. The liquid container has a window through which the laser beam enters. An image processing method is also disclosed which processes the image obtained by the image detector to obtain the focus spot size while implementing an algorithm that corrects for the effect of ambient vibration.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a divisional of and claims priority to U.S. patentapplication Ser. No. 16/027,137, filed Jul. 3, 2018, which isincorporated herein by reference in its entirety.

BACKGROUND OF THE INVENTION Field of the Invention

This invention relates to a measurement apparatus for measuring a laserfocus spot size for a laser ophthalmic surgical system, and inparticular, it relates to such a measurement apparatus for measuring alaser focus spot located in water or another liquid.

Description of Related Art

Laser ophthalmic surgical systems use a laser device to generate apulsed or continuous laser beam, and use a beam delivery optical systemto focus the laser beam to a highly focused light spot and deliver thelaser focus spot in target tissues of the eye to effectuate varioustypes of treatments of the eye. In many laser ophthalmic surgicalsystems, the laser device generates a pulsed laser beam havingultra-short pulse lengths in the range of femtoseconds to nanoseconds,and the beam is focused to a focus spot size as small as 1 μm or less. Ascanning device of the beam delivery system scans the laser focus spotinside the eye tissue to form incisions in the tissue. In such lasersurgical systems, the laser focus spot size in the eye is a criticalparameter that determines the tissue incision quality such as precisionof the incision. Spot size is also a critical parameter for designinglaser spot scan patterns that avoid collateral damage to eye tissues toensure patient safety.

Conventionally, the laser focus spot size of a laser system can bedetermined either by directly measuring it using a spot size camera,where the laser beam shines directly on the camera, or by indirectlyderiving it from wavefront measurements of the light beam. In bothtechniques, the laser focus spot in placed in the air, i.e., the laserspot is focused to a point in a volume of air or on a detector surfaceof the camera that is disposed in air. It is difficult to useconventional measurement techniques to measure laser focus spot sizessmaller than about 1 mm.

SUMMARY

Accordingly, the present invention is directed to a laser focus spotmeasurement apparatus and related method that substantially obviates oneor more of the problems due to limitations and disadvantages of therelated art.

An object of the present invention is to provide an easy to useapparatus that allows for measurement of laser focus spot in water oranother liquid.

Additional features and advantages of the invention will be set forth inthe descriptions that follow and in part will be apparent from thedescription, or may be learned by practice of the invention. Theobjectives and other advantages of the invention will be realized andattained by the structure particularly pointed out in the writtendescription and claims thereof as well as the appended drawings.

To achieve the above objects, the present invention provides ameasurement apparatus for measuring a laser focus spot size, whichincludes: a two-dimensional image detector having a detecting surface;an imaging system including at least an objective lens, the imagingsystem being disposed in front of the image detector and configured toform a magnified image of an object located on an object plane onto thedetecting surface of the image detector; and a sealed liquid containercontaining a liquid, the container including a flexible body with atransparent window and an opening, wherein the objective lens ispartially disposed through the opening and joined to the body in aliquid-tight seal, and wherein a front optical surface of the objectivelens is exposed to the liquid inside the container.

In one embodiment, the body of the container includes a bellows which isformed of rubber of a flexible plastic material. The transparent windowincludes a rigid frame and a transparent plate joined to the frame, therigid frame being disposed through another opening in the flexible bodyand joined to the body in a liquid-tight seal.

In one embodiment, the imaging system uses an infinite correctionconfiguration which uses another lens in addition to the objective lens.

In another aspect, the present invention provides a measurementapparatus for measuring a laser focus spot size, which includes: atwo-dimensional image detector having a detecting surface; an imagingsystem including at least an objective lens, the imaging system beingdisposed in front of the image detector and configured to form amagnified image of an object located on an object plane onto thedetecting surface of the image detector; and a liquid containercontaining a liquid and joined to the objective lens, wherein a frontoptical surface of the objective lens is exposed to the liquid insidethe container.

In another aspect, the present invention provides a measurementapparatus for measuring a laser focus spot size, which includes: atwo-dimensional image detector having a detecting surface; an imagingsystem including at least an objective lens, the imaging system beingdisposed in front of the image detector and configured to form amagnified image of an object located on an object plane onto thedetecting surface of the image detector; and a data processing devicecoupled to the image detector, configured to process image datagenerated by the image detector, the data processing device beingconfigured to: receive image data representing an image of a light beamfocus spot; calculate a centroid of the focus spot; determine whetherthe centroid is located at a predetermined center position; when thecentroid is located at the predetermined center position, store theimage in an image buffer; when the centroid is not located at apredetermined center position, define a region of interest (ROI) of theimage containing the focus spot and extract the ROI to a new image, thenew image containing the focus spot centered at the predetermined centerposition, and store the new image in the image buffer; and analyze theimages in the image buffer to calculate a size of the light beam focusspot.

In another aspect, the present invention provides a method implementedin a measurement apparatus for measuring a laser focus spot size, wherethe measurement apparatus includes a two-dimensional image detector, animaging system configured to form a magnified image of an object locatedon an object plane onto the detecting surface of the image detector, anda data processing device coupled to the image detector, where the dataprocessing device performs the following method: receiving image datarepresenting an image of a light beam focus spot; calculate a centroidof the focus spot; determining whether the centroid is located at apredetermined center position; when the centroid is located at thepredetermined center position, storing the image in an image buffer;when the centroid is not located at a predetermined center position,defining a region of interest (ROI) of the image containing the focusspot and extracting the ROI to a new image, the new image containing thefocus spot centered at the predetermined center position, and storingthe new image in the image buffer; and analyzing the images in the imagebuffer to calculate a size of the light beam focus spot.

It is to be understood that both the foregoing general description andthe following detailed description are exemplary and explanatory and areintended to provide further explanation of the invention as claimed.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates the overall structure of a water-immersed laser focusspot size measurement apparatus according to an embodiment of thepresent invention.

FIG. 2 schematically illustrates the working principle of laser focusspot measurement according to embodiments of the present invention.

FIGS. 3A and 3B schematically illustrate two alternative opticalconfigurations of the imaging system of the measurement apparatusaccording to embodiments of the present invention.

FIGS. 4A and 4B illustrate the structure of a liquid container of ameasurement apparatus according to an embodiment of the presentinvention.

FIG. 5 schematically illustrates an image processing method employed bythe measurement apparatus according to an embodiment of the presentinvention.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

Measuring the laser focus spot size is a critical task when developing abeam delivery optical system of a laser surgical system, as well as whenoperating or maintaining the laser surgical system. Conventional laserfocus spot size measurement techniques cannot satisfy the requirementsof high quality laser ophthalmic surgical systems. For example, inconventional techniques for measuring laser focus spot size, the laserbeam is focused in the air. However, for a high numerical aperture (NA)beam delivery system, for example, one with NA≥0.4, the placement of thelaser focus spot in the air introduces wavefront distortions that do notexist when the laser focus is under surgical conditions, i.e. when thelaser focus is located inside an eye tissue. The inventors recognizedthat such distortions can be excessive and undesirable when the systemhas an NA≥0.5, or when NA=0.4 but the focus spot is relatively deep inthe air, such as approximately 1 mm beyond the distal surface of thefocusing objective lens of the beam delivery optical system.

Embodiments of the present invention provide a measurement apparatus formeasuring the laser focus quality in the eye. The measurement apparatusenables measurement of the laser focus spot size in water, whichresembles tissues in the eye. The apparatus may be used to assess theperformance of high numerical aperture beam delivery system of asurgical femtosecond laser system or other laser systems.

The laser focus spot size measurement apparatus according to embodimentsof the present invention has the following characteristics.

The measurement apparatus places the laser focus spot into water whenmeasuring the focus spot size, since the refractive index of eye tissuesin the visual field (e.g., about 1.37 for cornea) is close to that ofwater (1.33). This is accomplished by using water-immersed spot sizemeasurement optics. Preferably, the optics adopt an infinite imagingoptical design to minimize the aberration and to optimize the precisionof the measurement.

The measurement apparatus includes a flexible water container/interfacedevice, which can conveniently couple the laser focus spot into theobject plane of the water-immersed spot size measurement optics.

Further, to accurately measure spot size on the order of 1 μm undernormal ambient vibration levels, an image processing algorithm andsystem are provided to overcome the effect of vibration movement betweenthe laser focus spot and the spot size measurement optics. This enablespractical applications of the measurement apparatus.

The overall structure of a water-immersed laser focus spot sizemeasurement apparatus is illustrated in FIG. 1. The measurementapparatus 10 includes a two-dimensional optical image detector 11 (alsoreferred to as a camera), and an optical assembly (imaging system) 12which is disposed in front of the detector and configured to form amagnified image of an object (such as a laser focus spot) located on anobject plane onto the detecting surface of the detector. The detector 11detects the size and shape of the image of the laser focus spot. Theimaging system 12 includes at least one objective lens 13 located at theupstream end of the optical path. The objective 13 is mounted on ahousing 14 which contains other optical components of the imagingsystem; the detector 11 is also mounted on the housing. A portion of thebeam delivery optical system 100 which delivers the laser focus spot isalso shown in FIG. 1. While in the illustrated embodiment the laser beamis delivered in the vertical direction, in other embodiments it may bein the horizontal direction.

In the illustrated embodiment, the housing 14 is a cylindrical tube withthe objective 13 and the detector 12 mounted at two opposite ends of thetube, via adapters 141 and 142, respectively. In alternativeembodiments, the optical path of the imaging system may fold inside thehousing, and the objective 13 and the detector 12 are located at the twoends of the optical path but may be mounted at any suitable physicallocations on the housing. The tube 14 may be conveniently provided withslots 143 for inserting desired optical components such as filters,waveplates, polarizers, etc. into the optical path of the imagingsystem. FIG. 1 also shows handle screws 144 associated with some slots.

The measurement apparatus 10 also includes a water (liquid) container 15physically attached to the objective 13 such that the outer opticalsurface of the objective is exposed to the liquid 16. The liquidcompletely fills the space between the last optical surface of the laserbeam delivery system 100 and the outer surface of the objective 13. Inother words, there laser beam propagates from the laser beam deliverysystem 100 to the objective 13 without passing through air. Thestructure of the liquid container 15 will be described in more detaillater.

FIG. 2 schematically illustrates the working principle of laser focusspot measurement. As shown in FIG. 2, the laser beam is focused to aposition located on an object plane O. The object point represents apoint in the laser focus spot that emits light. The imaging system 12,schematically depicted as a lens, images the points on the object planeO to points on the image plane of the detector 11, with a magnificationM. The image formation of the imaging system 12 may be represented by aconvolution of the object on the object plane with a point spreadfunction (PSF). The PSF of a given imaging system may be calculated bynumerical modeling based on parameters of the optical components withinthe imaging system. For a laser focus spot with known size and shape,the corresponding image spot size and shape at the imaging plane of thedetector 11 can be calculated from the PSF and magnification of thegiven imaging system 12. Conversely, from a measured image spot size andshape at the imaging plane of the detector 11, the object size and shapeat the object plane may be calculated using deconvolution.

The PSF and magnification of the imaging system 12 may also be obtainedempirically using a calibration process, by imaging objects having knownsizes, such as slits with known widths illuminated by a light source.

When the focus spot size is comparable to the wavelength of the laserlight, the imaging system should have very small aberration, with aStrehl ratio close to 1, so that the convolution with the SPF will notdistort the image. Also, the imaging system 12 preferably has a largerNA than that of the laser beam delivery system, so as to collectsubstantially all spatial information of the laser light. In preferredembodiments, the NA of the imaging system 12 (i.e., of the objective 13)is between 0.7 and 1.0, although other values may also be used. Theobjective 13 of the imaging system 12 preferably has a lateralmagnification between 50× and 100×, although other values may also beused.

The image detector 11 is a 2-dimensional detector with sufficientspatial resolution (pixel size) to adequately detect the shape of theimage of the focus spot. In some embodiments, the image detector has apixel size of 5 μm or less.

The imaging system 12 may employ either an infinite correctionconfiguration or a finite correction configuration. In a preferredembodiment, schematically shown in FIG. 3A, the imaging system 12Aemploys an infinite correction configuration, where the objective lens13A collimates the light emitted from a source point located on theobject plane O into a parallel beam, and a second lens 123 focuses theparallel beam to the surface of the detector 11. Other suitable opticalcomponents such as a waveplate 121 and a polarizer 122 may be providedbetween the objective 13A and the second lens 123. In an alternativeembodiment, schematically shown in FIG. 3B, the imaging system 12Bemploys a finite correction configuration, where the objective lens 13Bfocuses the light from a source point on the object plane O to thesurface of the detector 11. A second lens is not used. Other suitableoptical components such as a waveplate 121 and a polarizer 122 may beprovided between the objective 13B and the detector 11. The infinitecorrection configuration has a fixed magnification, while the finitecorrection configuration has a floating magnification. Note that theobjectives 13A and 13B are only schematically shown in FIGS. 3A and 3B,while each objective may include a set of lenses.

FIGS. 3A and 3B also schematically shows a part of the beam deliverysystem 100. In these examples, the laser beam is shown as being focusedat the lower surface of the last lens (which may be a flat glass) of thebeam delivery system.

For application in the focus spot size measurement apparatus, theinfinite correction configuration is more preferred because it providesbetter point spread function, modulation transfer function and encircleenergy, and correspondingly, lower aberration and higher resolution.Moreover, for the infinite correction configuration, adding opticalcomponents to the imaging system downstream of the objective does notadd aberration, whereas it does in the finite correction configuration.Further, if an existing measurement apparatus is to be modified tomeasure smaller spot sizes, in the infinite correction configuration,only the objective 13A needs to be changed but the distance between theobjective and the detector (and correspondingly, the physical housingfor the optics) does not need to be changed, whereas in the finitecorrection configuration, both the objective and the distance betweenthe objective and the detector (and correspondingly, the housing) needto be changed. In the finite correction configuration, the floating ofthe magnification, the working distance and the aberration are factorsthat may trade off with each other to give a slightly wrong spot size.

In one particular embodiment employing the infinite correctionconfiguration and used with a water container, the objective 13 has amagnification of 63, a numerical aperture of 0.9, a free workingdistance of 2.4 mm, a cover glass thickness of 0 mm, a field of view of23 mm, and a parfocal length of 45 mm.

Note that for simplicity, FIGS. 2, 3A and 3B do not show the liquid, butin embodiments of the present invention, a liquid such as water fillsthe optical path between the beam delivery system 100 and the objective13.

FIGS. 4A and 4B illustrate the structure of a liquid container 15according to one embodiment of the present invention. FIG. 4A is aperspective image, and FIG. 4B is a schematic illustration of across-section, of the liquid container 15 joined with the objective 13.The liquid container 15 has a flexible body 151 with a top opening 152and a bottom opening 153. The flexible body 151 may be made of anysuitable material such as rubber, polyurethane or other plastics, etc.In a preferred embodiment, the body 151 has the shape of a bellows.

A window structure is secured to the top opening 152 of the body 151 ina liquid-tight manner. The window structure includes a rigid framemember (e.g. a ring) 154 and a transparent plate (e.g. glass plate orplastic plate) 156 joined to the frame to form a window. Any suitablestructures may be used to secure the top opening with the windowstructure in a liquid-tight coupling. For example, the top opening mayinclude a collar 152 formed of the same material as and integrally withthe bellows, where the collar is placed around the rigid frame 154 andtied from the outside (for example by a tie 155 as seen in FIG. 4A),and/or glued to the rigid frame. An adapter ring or gasket made of adeformable material may be placed between the collar and the rigid frameto facilitate the liquid-tight seal between the frame and the topopening. The upper section of the rigid frame 154 may have a shape andstructure configured to mechanically couple with a structure at thelower end of the beam delivery system 100.

The bottom opening 153 of the flexible body 151 is secured around acylindrical section of the objective 13 in a liquid-tight manner. Anysuitable structures may be used to secure the bottom opening with theobjective, for example similar to those described above. The twoopenings are configured such that the surface of the objective 13 issubstantially parallel to the glass plate 156.

The interior of the flexible body 151 is filled with water or anothersuitable liquid 16. As both the top and bottom openings are sealed in aliquid-tight manner, the entire container is liquid-tight, making iteasy to handle. This enhances the usability and serviceability of theentire measurement apparatus.

In a preferred embodiment, the shape of the liquid container 15 isdesigned to prevent small air bubbles within the container frominterfering with measurement. While the contained 15 should be filled asfull as possible, small bubbles may form due to incomplete filling whenthe container is assembled, or may develop over time due to slow leakageor degassing of various plastic components. The liquid container 15 isshaped such that in the intended orientation during measurement, forexample in the upright orientation as shown in FIGS. 4A and 4B or a insideways orientation, the glass plate 156 is not located at the highestpoint of the container. As a result, during use, any air bubbles can beeliminated from the space between the glass plate 156 and the objective13.

The overall size of the liquid container 15 is dictated by the size ofthe objective 13 and the relevant portions of the beam delivery system100, as well as the designed distance between the surface of theobjective 13 and the object plane. For example, the liquid container 15may be designed such that the glass plate 156 is at or slightly beyondthe object plane of the objective 13. In some embodiments, the liquidcontainer 15 is approximately a few inches in diameter and a few inchestall.

The material and the physical parameters (e.g. wall thickness) of theflexible body 151 are chosen to ensure that the body has sufficientstructural rigidity such that it can maintain its shape when noadditional external force is applied, but can deform to a certain extent(e.g. by a few mm) in the axial direction (Z) and the transversedirections (X, Y), and can bend or twist, when sufficient forces areapplied.

In use, the objective 13 is mounted on the housing 14 of the measurementapparatus, which in turn is mounted on a mechanical support structureallowing its position to be adjusted. The lower end of the objective ofthe beam delivery system 100 (schematically represented by the dashedline shape in FIG. 4B) is inserted through the rigid frame 154 andpresses against the glass plate 156. The flexible body 151 allows theobjective 13 and the beam delivery system 100 to be precisely aligned sothat the laser focus spot is located at the desired position on theobject plane for proper imaging by the imaging system 12. Alignment maybe accomplished using mechanical structures of the laser beam deliverysystem and/or the mechanical support structure of the measurementapparatus. Any suitable mechanical structures may be used. In preferredembodiments, the amount of adjustment needed to align the beam deliverysystem 100 and the imaging system 12 is a new mm or less.

The image of the spot detected by the detector 11 is processed by acontroller or data processing device 20 (see FIG. 1) coupled to thedetector to determine the size of the detected image and calculate thesize of the laser focus spot. The controller or data processing devicemay be, for example, a computer which includes processors and memoriesstoring computer-readable program code which can be executed by theprocessors.

FIG. 5 schematically illustrates an image processing algorithm foranalyzing the image detected by the detector 11 which corrects orminimizes the effect of ambient vibration. Such vibration causes smallrelative movements between the laser focus spot and the spot sizemeasurement optics, which can significantly impact the accuracy of thespot size measurement when the laser focus spot size is on the order of1 μm. As shown in FIG. 5, after the detector records an image of thefocus spot (step S51), the centroid of the spot is calculated (stepS52). It is then determined whether the spot (the centroid) is centeredat a predetermined center location (step S53). If it is (“Yes”), thespot image is copied to an image buffer (step S54) and used as is insubsequent processing to calculate spot size. If the spot is notcentered (“No”), the location of a region of interest (ROI) of the imageis calculated according to the new center (the centroid position) (stepS55), and the ROI is defined (step S56) and extracted to a new image(step S57). The new image, which contains the spot centered at thepredetermined center location, is copied to the image buffer (step S54).Multiple images are taken over a period of time, and steps S51 to S57are performed for each image. The spot images stored in the image bufferare then analyzed to calculate the laser focus spot size (step S58).This may be done, for example, by obtaining a light intensity profile ofthe spot image and determining the width of the profile at 50% maximumintensity. As mentioned earlier, the size of the laser focus spot may becalculated from the size of the spot image on the detector. In additionto spot size, the analysis may obtain other characteristics of the focusspot.

Although water is used in the above described embodiment as the contentof the container 15, any other suitable liquid may be used such as anaqueous solution, etc.

It should be noted that the focus spot size measurement principle andthe related optical system shown described above may also be used tomeasure the size of a laser focus spot located in water, they may alsobe used to measure the size of a laser focus spot located in othermedia, such glass, a piece of ex-vivo eye tissue such as cornea tissueand lens tissue.

It will be apparent to those skilled in the art that variousmodification and variations can be made in the laser focus spot sizemeasurement apparatus and related method of the present inventionwithout departing from the spirit or scope of the invention. Thus, it isintended that the present invention cover modifications and variationsthat come within the scope of the appended claims and their equivalents.

1-9. (canceled)
 10. A measurement apparatus for measuring a laser focusspot size, comprising: a two-dimensional image detector having adetecting surface; an imaging system including at least an objectivelens, the imaging system being disposed in front of the image detectorand configured to form a magnified image of an object located on anobject plane onto the detecting surface of the image detector; and aliquid container containing a liquid and joined to the objective lens,wherein a front optical surface of the objective lens is exposed to theliquid inside the container.
 11. The measurement apparatus of claim 10,wherein the imaging system further includes a housing, wherein theobjective lens is mounted at one end of the housing and the imagedetector is mounted at another end of the housing.
 12. The measurementapparatus of claim 10, wherein the imaging system further includes asecond lens disposed inside the housing in front of the image detector,wherein the objective lens is configured to collimate light emitted froma source point located on the object plane into a parallel light beam,and the second lens is configured to focus the parallel light beam tothe detecting surface of the image detector.
 13. The measurementapparatus of claim 12, wherein the objective lens has a numericalaperture NA between 0.7 and 1.0, and a lateral magnification between 50×and 100×.
 14. The measurement apparatus of claim 13, wherein the imagedetector has a pixel size of 5 μm or less.
 15. The measurement apparatusof claim 10, wherein the objective lens is configured to focus lightemitted from a source point located on the object plane to the detectingsurface of the image detector.
 16. The measurement apparatus of claim10, further comprising a data processing device connected to the imagedetector and configured to process image data generated by the imagedetector to determine a spot size of a light focus spot located at theobject plane.
 17. A measurement apparatus for measuring a laser focusspot size, comprising: a two-dimensional image detector having adetecting surface; an imaging system including at least an objectivelens, the imaging system being disposed in front of the image detectorand configured to form a magnified image of an object located on anobject plane onto the detecting surface of the image detector; and adata processing device coupled to the image detector, configured toprocess image data generated by the image detector, the data processingdevice being configured to: receive image data representing an image ofa light beam focus spot; calculate a centroid of the focus spot;determine whether the centroid is located at a predetermined centerposition; when the centroid is located at the predetermined centerposition, store the image in an image buffer; when the centroid is notlocated at a predetermined center position, define a region of interest(ROI) of the image containing the focus spot and extract the ROI to anew image, the new image containing the focus spot centered at thepredetermined center position, and store the new image in the imagebuffer; and analyze the images in the image buffer to calculate a sizeof the light beam focus spot.
 18. The measurement apparatus of claim 17,wherein the size of the light beam focus spot is calculated based onknown point spread function and lateral magnification of the imagingsystem.